Machine Learning and Deep Learning
ML and DL for heat transfer design
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Video+CNN for additive manufacturing
Machine learning for additive manufacturing
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Optics, Nanophotonics and Nanofabrication
Transient Reflective Probing |
Nano fabrication
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Laser sources: CW, nanosecond lasers
Optics: PBS, 1/4 wave, 1/2 wave, notch filter Oscilloscope, photodetector, color camera Motion control, NC programming. Home-built MicroscopeMicroscale transmission and reflection probing with different light sources.
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* Nanofabrication for Non-MOS wafer scale photonics metasurfaces and electrical test circuits:
-250nm node layout design (L-edit, Tanner) -Photolithography(ASML 5500/300) -RIE(Lam Research, STS) -Deposition(Ebeam Evaporation, ALD, LPCVD, PECVD) -Metrology(AFM, Ellipsometry, SEM, Nanospec, FIB) -Epitaxial growth of Ge on Si (Applied Materials, Centura) -CD reduction: double deposition and over-etch *Tool development: Upgrade the Laser-assisted chemical vapor deposition (LACVD) tool with -additional high power nanosecond pulsed laser. Carried out damage threshold, beam alignment and focusing tests. -additional vacuum chamber *Research and Process Development: -Laser-assisted atomic layer etching of amorphous silicon film and silicon wafers with Cl2 gases. |
Disclaimer: The schematics and images are originally created by Letian Wang. Most of them are not published. (c) Letianwang.me 2018
Hardware Development
Micro thermometer with RF electrical measurement and LabView interface |
Multi-beam Laser Chemical Processing |
Simulation
Simulator for heat transfer and phase change (home-built for LTL, collaborated with Jung Bin In)
Crystallization based on Phase Field Function (CS 294: Software Engineering for Scientific Computing)
![]() I was in charge of the initiation of the idea, basic algorithm search and test development. Please check my Github and Report.
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Commercial Simulator
Lumerical FDTDMie-scatteringPancharatnam-Berry Phase |
Zemax (EE 218A, Laura Waller)COMSOL(thermal, fluid, electrical)LTspice |